摘要 |
An array contact is provided to reduce the total resistance by forming the array contact very much on the same area. As to the array contact in which the contact connecting the conductive layer separated into the insulating layer is arranged with grid structure, the array contact wherein the virtual contact is not formed by removing the one among four contacts comprised lattice. The distance of the cross direction between the contacts of the array contact structure is arranged not to exceed the treble of the horizontal width of the contact. The distance of lengthwise between the contacts is arranged not to exceed the treble of the vertical width of the contact.
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