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发明名称
以晶圆前侧气体净化来移除晶圆背侧聚合物的制程
摘要
在此提供一种从工件背侧去除聚合物的制程。该制程包括在真空腔中由工件背侧支撑住该工件,同时使该背侧一周边环形部分被暴露出来。气体流被限定在位于工件边缘处之一间隙内的该工件边缘处,且该间隙被设定成约为腔室直径的1%,该间隙界定出一边界其位在含有前侧的上方处理区与含有背侧的下方处理区之间。制程还包括排空下方处理区,由聚合物蚀刻前驱物气体在外部腔室中产生电浆,并将副产物从电浆引入到下方处理区中。制程还包括将净化气体泵送到上方处理区以从上方处理区去除聚合物蚀刻物种。
申请公布号
TW200842974
申请公布日期
2008.11.01
申请号
TW097103575
申请日期
2008.01.30
申请人
应用材料股份有限公司
发明人
柯林肯尼S;塙广二;盖叶安德鲁恩;芭拉克利斯纳阿杰;帕拉葛西维里大卫;克鲁斯詹姆士P;孙珍妮佛Y;托多罗瓦伦汀N;罗夫沙西德;拉马斯瓦米卡提克;席尼德吉拉德M;尤瑟夫以马德;纱丽讷丝马丁杰佛瑞
分类号
H01L21/3065(2006.01)
主分类号
H01L21/3065(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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