发明名称 Double sided probing structures
摘要 A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.
申请公布号 US2008265925(A1) 申请公布日期 2008.10.30
申请号 US20080217359 申请日期 2008.07.03
申请人 CASCADE MICROTECH, INC. 发明人 BURCHAM TERRY;MCCANN PETER;JONES ROD
分类号 G01R1/067 主分类号 G01R1/067
代理机构 代理人
主权项
地址