MOVING BODY APPARATUS, APPARATUS FOR FORMING PATTERN, METHOD OF FORMING PATTERN, METHOD OF PRODUCING DEVICE, METHOD OF PRODUCING MOVING BODY APPARATUS, AND METHOD OF DRIVING MOVING BODY

摘要

A substrate stage (21) and a weight cancel mechanism (27) for supporting the own weight of the substrate stage (21) are constructed as separate bodies. This enables a substrate stage (structure including the substrate stage) to be made smaller and lighter than in the case where the substrate stage and the weight cancel mechanism are unitized. Further, when an X rough movement stage (23X) and a Y rough movement stage (23Y) are moved by an X drive mechanism (97X) and a Y drive mechanism (97Y), the substrate stage is driven in an XY plane and the cancel mechanism for supporting the own weight of the substrate stage is also driven. Although the substrate stage and the weight cancel mechanism are constructed as separate bodies, the substrate stage can be driven without problems.