| 摘要 |
<p>A TFT array inspection device comprises a stage (2) for a glass substrate, a stage drive mechanism, and an electronic gun unit (3) provided above a main chamber (1). The stage (2) for a glass substrate is disposed in the main chamber (1) and at least the drive motor (7a) of a Z-stage drive mechanism (7) provided in the stage drive mechanism is disposed outside the main chamber (1), whereby the main chamber can be small-sized. The Z-stage drive mechanism is driven by the Z-axis drive motor (7a) disposed outside the main chamber (1), and moves a Z-stage (2d) disposed in the main chamber (1) in the Z-direction. Since the drive motor is disposed outside the main chamber, a drive motor with a large output torque can be used to increase the drive speed of the Z-stage, thereby enhancing a throughput for inspection of a glass substrate.</p> |
