| 发明名称 |
INTEGRATED CIRCUIT ISOLATION SYSTEM |
| 摘要 |
<p>Integrated Circuit Isolation System Disclosed herein is a method of manufacturing a self-aligned inverted T- shaped isolation structure. A method of manufacturing an integrated circuit isolation system (100) includes providing a substrate (202), forming a base insulator region (702) in the substrate (202), and depositing an insulator column (1102) having a narrower width than the base insulator region (702) on the base insulator region (702).</p> |
| 申请公布号 |
SG146480(A1) |
申请公布日期 |
2008.10.30 |
| 申请号 |
SG20070022635 |
申请日期 |
2007.03.29 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;CHARTERED SEMICONDUCTOR MANUFACTURING LTD |
发明人 |
CHONG YUNG FU;LUO ZHIJIONG |
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