| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for easily determining a crystal orientation and a grain boundary angle of an FIM sample even by a less-informed and unexperienced worker, and to provide a device for determining a crystal orientation even for a sample difficult to determine orientation conventionally because a crystal grain size is small. SOLUTION: The crystal orientation determination device comprises at least an image data fetching means of a field-ion microscope (FIM) image with respect to the crystal grain in a measured sample, a means for rotating a logical crystal orientation pole of an object crystal grain to correspond to a specific crystal orientation pole in the fetched FIM image, a means for determining crystal orientation poles l, m, n of the specific crystal orientation poles from a result of rotating operation, and a means for superimposing and displaying the FIM image and the determined crystal orientation poles l, m, n. COPYRIGHT: (C)2009,JPO&INPIT
|
