| 摘要 |
PROBLEM TO BE SOLVED: To improve a function of an atom probe device capable of investigating an atom structure in a very minute region by directly measuring atoms one by one. SOLUTION: This invention provides this atom probe device characterized by including: an electric field ion microscope device; an electric field ion microscope image introduction device introducing an electric field ion microscope image imaged by the electric field ion microscope device; and an electric field ion microscope image analyzer analyzing the introduced electric field ion microscope image. COPYRIGHT: (C)2009,JPO&INPIT
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