| 摘要 |
PROBLEM TO BE SOLVED: To provide a sintered compact composed of an Y<SB>2</SB>O<SB>3</SB>single phase having a high corrosion resistance to corrosive gases and their plasmas used in manufacturing processes of semiconductors or liquid crystals. SOLUTION: The Y<SB>2</SB>O<SB>3</SB>-based sintered compact contains (a) 99.7 wt.% of Y<SB>2</SB>O<SB>3</SB>, (b) 0.05-0.3 wt.% of SiO<SB>2</SB>, (c)≤0.02 wt.% of Al<SB>2</SB>O<SB>3</SB>, (d)≤0.01 wt.% of TiO<SB>2</SB>, (e)≤0.01 wt.% of inevitable impurities, (f) is composed of an Y<SB>2</SB>O<SB>3</SB>single phase in the absence of the second phase as the crystal phase, and has (g) a relative density of≥95% and (h) an average crystal particle size of 5-20μm. COPYRIGHT: (C)2009,JPO&INPIT
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