| 摘要 |
An isolation valve system includes a main body ( 32 ), an actuator body ( 34 ) and a sealing membrane ( 307 ) arranged at a high pressure portion ( 36 ) of the isolation valve system. The sealing membrane mechanically attaches the actuator body to the main body. The sealing membrane further seals the high pressure portion from a low pressure portion ( 38 ). A burst plug ( 315 ) is arranged against the main body and supports the actuator body. An activation arrangement ( 50 ) is arranged for allowing an at least partial displacement of the burst plug, typically causing a phase transition. The sealing membrane is dimensioned to break when the actuator body is moved due to the displacement of the burst plug. The isolation valve system includes preferably a stack ( 30 ) of substrates ( 301 - 304 ) being bonded together. The substrates have micromechanical structures, which form at least the actuator body and the sealing membrane.
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