| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporative cooling device capable of uniformly evaporatively cooling the entire cooling chamber. SOLUTION: A jacket portion 2 is mounted at an outer periphery of a reaction pot 1. A cooling fluid pipe conduit 6 is arranged in the jacket portion 2. A plurality of cooling fluid injection nozzles 25 for injecting the cooling fluid to an outer surface of the reaction pot 1 are mounted at a reaction pot 1 side of the cooling fluid pipe conduit 6. The nozzles 25 are respectively composed of a cooling fluid spray port 29 and upper and lower boundary portion cooling fluid spray ports 27, 28. In a case of cooling the reaction pot 1, the cooling fluid is injected from the cooling fluid injection nozzles 25 into the jacket portion 2, thus the cooling fluid is evenly supplied to the entire outer surface of the reaction pot 1, and the entire reaction pot 1 can be uniformly evaporatively cooled. COPYRIGHT: (C)2009,JPO&INPIT
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