METHOD AND SYSTEM FOR EVALUATING A VARIATION IN A PARAMETER OF A PATTERN
摘要
<p>A method and system are presented for evaluating a variation of a parameter of a pattern. The method includes processing data indicative of an aerial intensity image of at least a portion of a patterned article, and determining values of a certain functional of the aerial image intensity for predetermined regions within the at least portion of the patterned article. The values of the aerial image intensity functional are indicative of a variation of at least one parameter of the pattern within the at least portion of the patterned article or are indicative of a variation of at least one parameter of a pattern manufactured by utilizing the patterned article.</p>
申请公布号
EP1984895(A2)
申请公布日期
2008.10.29
申请号
EP20070706073
申请日期
2007.02.01
申请人
APPLIED MATERIALS ISRAEL LTD.
发明人
BEN YISHAI, MICHAEL;WAGNER, MARK;BARTOV, AVISHAI;GREENBERG, GAD;SHOVAL, LIOR;GVIRTZER, OPHIR