发明名称 |
Chip microphone and method of making same |
摘要 |
<p>A chip microphone implemented as a single silicon-based chip includes a diaphragm which includes a vibration portion that vibrates in response to sound pressures, a support block which is formed on the diaphragm, excluding at least the vibration portion to provide a vibration space, and a back plate which is formed on the support block and over the vibration space, thereby facing the vibration portion of the diaphragm across the vibration space.
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申请公布号 |
EP1292171(A3) |
申请公布日期 |
2008.10.29 |
申请号 |
EP20020256161 |
申请日期 |
2002.09.05 |
申请人 |
NIPPON HOSO KYOKAI |
发明人 |
TAJIMA, TOSHIFUMI;NISHIGUCHI, TOSHIYUKI;SAITO, NOBUO;MORITA, AKIRA |
分类号 |
H04R19/00;H04R25/00;H04R31/00 |
主分类号 |
H04R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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