VERTICAL HEAT TREATMENT APPARATUS, AND CARRYING METHOD FOR SUBSTRATE TO BE TREATED

摘要

A vertical heat treatment apparatus and a carrying method for a substrate to be treated are provided to transport plural substrates by using a supporting plate with a cutout part through which a mounting board passes up and down. A vertical heat treatment apparatus(1) comprises a thermal process furnace(3); a covering unit(6); a retainer(9) equipped at the covering unit and retaining the plural substrates with a ring type supporting plate(15); an elevating unit(11) moving up and down the covering unit in order to take in and out the retainer; a container(16) containing the substrates to be treated and securing a constant distance; a mounting board(20) for containing substrates to be treat; an outer supporting plate including a cutout part through which the mounting board passes up and down; an inner supporting plate including a chock blocking part for chock-blocking the cutout part.