CAPACITIVE TRANSDUCER DEVICE AND IN-BODY-CAVITY DIAGNOSTIC ULTRASOUND SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a capacitive transducer device dispensing with a high-voltage direct current bias voltage when receiving ultrasonic waves and dispensing with a charge amplifier and an impedance conversion. SOLUTION: A capacitive ultrasonic transducer device includes: a capacitive ultrasonic transducer (cMUT) obtained by processing a silicon substrate by using a silicon micromachining technique; and an oscillator circuit having the cMUT as a capacitor, and outputting a frequency modulation signal by modulating a frequency of an oscillation signal to be output on the basis of a change of capacitance of the cMUT. COPYRIGHT: (C)2009,JPO&INPIT