| 摘要 |
PROBLEM TO BE SOLVED: To check whether an electronic component on a wafer supply table is picked up accurately in accordance with wafer map data. SOLUTION: A recognition processor 96 recognizes an image of chip component A picked up by a component recognition camera 63 on the basis of map data including chip fault information and no-chip information of chip component A and coordinate data of the chip component. Based on this recognition processing result, a CPU 91 judges whether a component is the chip component A or not the chip component. If the component that is assumed not to be the chip component is judged as the chip component A, the operation is controlled to stop. COPYRIGHT: (C)2009,JPO&INPIT |
