发明名称 OPTICAL HEATING DEVICE AND OPTICAL HEATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical heating device and an optical heating method that allow uniform heating of a heating target. SOLUTION: A photothermal conversion wall 3 is provided between a light source 1 and a workpiece 5 as a heating target. The photothermal conversion wall 3 is heated by light of the light source 1. The workpiece 5 is heated by convection heat transfer and radiation from the photothermal conversion wall 3. The photothermal conversion wall 3 not only converts light into heat by absorbing light but also diffuses heat by heat transfer so as to heat the workpiece 5 by convection heat transfer and radiation from the whole inner face of the photothermal conversion wall 3. The photothermal conversion wall 3 is formed into a shape that covers the upper part and the side-face parts of the workpiece 5 or the whole face around the workpiece 5 so as to heat the workpiece 5 not only from the upper face of the workpiece 5 but also from the side faces and the rear face of the workpiece 5. By these, it is possible to suppress variations in temperature due to a reflectance of the workpiece 5, the way how the workpiece 5 is irradiated with light, a shape of the workpiece 5, and an installation place of an optical heating device. Consequently, it is possible to uniformly heat the workpiece 5. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008251733(A) 申请公布日期 2008.10.16
申请号 JP20070089704 申请日期 2007.03.29
申请人 NEC CORP 发明人 ODA MASAYUKI
分类号 H01L21/26;H01L21/324 主分类号 H01L21/26
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