| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystallizing method of a thin film enabling to crystallize a thin film phosphor or the like uniformly in the depth direction. SOLUTION: In a method of crystallizing the thin film (thin film phosphor raw material film 30) formed on the upper layer of a substrate 12, while applying a voltage onto the substrate 12 side, an outer energy (light 32) is given to a surface side of the thin film, and by utilizing that an electron (excited electron 33) of the thin film excited by the outer energy moves in the thin film by an electric field formed by the voltage, and releases excitation energy when the electron (moved excited electron 34) returns to the ground state, a heating region in the thin film is controlled and the thin film is crystallized. The heating region can be controlled arbitrarily when giving the outer energy to the thin film, and the thin film having a thickness in particular can be crystallized uniformly to some extent in the depth direction. COPYRIGHT: (C)2009,JPO&INPIT
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