发明名称 Photoresist composition and method of manufacturing a thin-film transistor substrate using the same
摘要 In one example, a photoresist composition includes about 1 to about 70 parts by weight of a first binder resin including a repeat unit represented by the following Chemical Formula 1, about 1 to about 70 parts by weight of a second binder resin including a repeat unit represented by the following Chemical Formula 2, about 0.5 to about 10 parts by weight of a photo-acid generator, about 1 to about 20 parts by weight of a cross-linker and about 10 to about 200 parts by weight of a solvent. The photoresist composition may improve the heat resistance and adhesion ability of a photoresist pattern. wherein R<SUB>1 </SUB>and R<SUB>2 </SUB>independently represent an alkyl group having 1 to 5 carbon atoms, and n and m independently represent a natural number.
申请公布号 US2008254634(A1) 申请公布日期 2008.10.16
申请号 US20080082436 申请日期 2008.04.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK JEONG-MIN;JUNG DOO-HEE;LEE HI-KUK;YOUN HYOC-MIN;KOO KI-HYUK
分类号 H01L21/311;G03F7/004 主分类号 H01L21/311
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