| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide stable flow control even under high temperature environment by releasing a tension applied to a piezoelectric element when a piezoelectric actuator 16 is retracted. <P>SOLUTION: This piezoelectric element driving control valve 1 comprises: a body 8 having a valve seat 8d; a metal diaphragm 9 coming into contact with and separating from the valve seat 8d; an actuator box 13 liftably supported on the body 8 side; a split base 11 secured to the body 8 side; a disc spring 15 bringing the metal diaphragm 9 into contact with the valve seat 8d by pressingly biasing the actuator box 13 downward; and a piezoelectric actuator 16 stored in the actuator box 13 and pushing up the actuator box 13 against the elastic force of the disc spring 15 by extending upward by the application of a voltage thereto. A preload mechanism 20 for always applying a compressive force to the piezoelectric element of the piezoelectric actuator 16 is interposed between the split base 11 and the piezoelectric actuator 16. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
