METHOD AND APPARATUS FOR MEASURING ATTITUDE CHANGE

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for three-dimensionally and precisely measuring an attitude change in a test surface which is moved rotationally. SOLUTION: A measurement jig 3 having first and second reflecting flat surfaces 31, 32 whose surface normal lines N1, N2differ from each other in direction, is set on the test surface 5, and interference fringe images each carrying tilt information of the first and second reflecting flat surfaces 31, 32 are photographed at a plurality of timings in the process of the rotational movement of the test surface 5, by using an interferometer 1. The photographed interference fringe images are analyzed respectively, whereby directional changes in the surface normal lines N1, N2of the first and second reflecting flat surfaces 31, 32 and a directional change in a cross line 33 are obtained. Then, each rotation angle of the test surface 5 about orthogonal three axes is calculated based on an obtained result. COPYRIGHT: (C)2009,JPO&INPIT