摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor whose reliability can be improved by supporting a lead pin at a sealed electrode terminal in a stable state, and which can be manufactured at a low cost by making a component common. SOLUTION: The lead pin 16 of the sealed electrode terminal 12 is fixed to a substrate 17, and support sections 14E1, 14E2 which define a prescribed space d between the substrate 17 and a plate-like section 14 of the sealed electrode terminal 12 and support the substrate 17, are disposed on the plate-like section 14 of the sealed electrode terminal 12, and then the lead pin 16, substrate 17 and the plate-like section 14 are unified. The lead pin 16 projecting from the plate-like section 14 is supported on its head side by the substrate 17, and the substrate 17 is supported and fixed to the plate-like section 14 through the support sections 14E1, 14E2, whereby a lateral load on the base of the lead pin 16 is reduced. Therefore, the reliability of the sealed portion is prevented from lowering, and the output of the pressure sensor 13 can be surely stabilized for the long term. COPYRIGHT: (C)2009,JPO&INPIT
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