| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter device which keep the clogging of a filter suppressed for a long period and reduces the number of maintenances, and also provide a pattern forming apparatus with the filter device. SOLUTION: The filter device 105 has an almost cylindrical mesh filter 111, a housing 112 storing the filter 111, and a plurality of ultrasonic wave vibrators 113, 114, 115, and 116 which are adhered and fixed outside the housing 112. The mesh filter 111 is grounded. COPYRIGHT: (C)2009,JPO&INPIT
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