| 摘要 |
PROBLEM TO BE SOLVED: To precisely dispose a substrate and to make a device compact. SOLUTION: A substrate alignment device 51 comprises a substrate position detecting unit 30a, a moving stage 12a, a moving stage driving unit 53a, a stage position detecting unit 27a, and a total control unit 50. The moving stage 12a comprises a base unit 56, displacement units 57 to 59, a driven unit 61, and a substrate holer 62. The substrate holer 62 holds the substrate 10. When the displacement units 57 to 59 displace the substrate holer 62 in X, Y, andθdirections based upon the position of the substrate 10 detected by the substrate position detecting unit 30a to dispose the substrate, the substrate holder 62 floats over the base unit 56 and after the substrate is disposed, the substrate holer 62 is suctionally fixed to the base unit 56. COPYRIGHT: (C)2009,JPO&INPIT |
