| 摘要 |
PROBLEM TO BE SOLVED: To evaluate precisely dimension accuracy of a measuring object. SOLUTION: This dimension measuring device 1 for measuring the dimension of the measuring object 2 is equipped with a conveyance means 5 for conveying the measuring object 2, a temperature control means for controlling the temperature in conveyance domains 10, 11 to which the measuring object 2 is conveyed, a dimension measuring means 15 for measuring the dimension of the measuring object 2 conveyed to a measuring part 6 in the conveyance domains 10, 11, and a temperature measuring means 14 for measuring the temperature of the measuring object 2 during dimension measurement by the dimension measuring means. The dimension of the measuring object 2 measured by the dimension measuring means 15 is corrected into a dimension at a reference temperature determined beforehand by using the temperature measured by the temperature measuring means 14. COPYRIGHT: (C)2009,JPO&INPIT
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