CONNECTING BOARD, PROBE CARD AND ELECTRONIC COMPONENT TESTING APPARATUS PROVIDED WITH THE PROBE CARD
摘要
<p>A probe card (50A) is provided with a probe needle (60) which is brought into electrical contact with an input/output terminal of an IC device formed on a semiconductor wafer (W); a mount base (51) whereupon the probe needle (60) is mounted; a supporting column (53) for supporting the mount base (51); a wiring board (55) having a wiring pattern electrically connected to the probe needle (60) through a bonding wire (52); and a base member (56) and a stiffener (57) for reinforcing the probe card (50A). The mount base (51) and the wiring board (55) are in a non-contact state.</p>