发明名称 INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL, AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To help a user to effectively use all available information and set a nominal profile constituting a profile space and its variations. SOLUTION: This method includes importing an image 42 of an object and superimposing on this image, either by hand or automatically, an estimated profile 20. The estimated profile is defined mathematically and adjusts 40 a handle 30 segment by segments, in order to match with the image. Alternatively or additionally, the user may trace (or free-draw) the profile of a known image and subsequently map a shape-definer of mathematical functions, such as a polynomial equation, a spline or a vector onto the estimated profile, in order to obtain a profile and one or more variables of that profile that can be used to reconstruct the profile of an unknown object from its diffraction pattern. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008249686(A) 申请公布日期 2008.10.16
申请号 JP20080002186 申请日期 2008.01.09
申请人 ASML NETHERLANDS BV 发明人 CRAMER HUGO AUGUSTINUS JOSEPH;KIERS ANTOINE GASTON MARIE;VAN DER PLOEG DURK OEDS;NAUMOSKI GOCE;VAN WEEL ROLAND MARK
分类号 G01B11/24;G01N21/00;G01N21/21;G01N21/27;G01N21/47;G01N21/956;H01L21/027;H01L21/66 主分类号 G01B11/24
代理机构 代理人
主权项
地址