| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor capable of high-speed detection of a plurality of gases. SOLUTION: This gas sensor is equipped with a semiconductor laser 22; an external resonance type wavelength sweeping light source 21, including a diffraction grating 23 for making the semiconductor laser 22 oscillate by an external resonance mode and an MEMS scanner 30, for sweeping the wavelength of light W emitted in the orthogonal direction to the end face 22b of the semiconductor laser 22 in a wavelength range, including the absorption spectrum wavelength characteristics to a detection object gas by driving of the MEMS scanner 30, and allowing the light W subjected to the wavelength sweeping to enter a detection object gas atmosphere; and a light-receiving element 70 for receiving light W' transmitted through the detection object gas atmosphere and detecting its intensity of light. COPYRIGHT: (C)2009,JPO&INPIT
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