| 摘要 |
PROBLEM TO BE SOLVED: To form a thin film without breakage in a recess in forming the thin film on a substrate having the recess by the use of a so-called STP method. SOLUTION: A coated film 104 is formed on the main surface of a substrate 105 by applying a coating liquid by, for instant, a spin coating method. The coating liquid is produced by including a thin film raw material being a thin film material and an organic material composed of an organic compound with its surface energy smaller than that of the thin film material. For instance, the thin film material is a polyimide, the thin film raw material is a polyamic acid as a precursor to a polyimide, and the organic material is a polycaprolactone. Further, the coating liquid is produced by dissolving these poliamic acids and polycaprolactone in 1-methyl-2-pyrrolidone. COPYRIGHT: (C)2009,JPO&INPIT |
