发明名称 METHOD AND DEVICE FOR HOLDING AND CENTERING OF SUBSTRATES
摘要 <p>A centering pin arrangement for clamping a substrate with a hole with radius r<SUB>max </SUB>comprises two bolts ( 2, 3 ) with an essentially semicircular cross section K, said bolts having radii r<SUB>2 </SUB>and r<SUB>3 </SUB>respectively. Said radii r<SUB>2 </SUB>and r<SUB>3 </SUB>are different and at least one of the bolts ( 2, 3 ) has a radius bigger or equal to the radius r<SUB>max </SUB>of the hole. In another embodiment both radii r<SUB>2 </SUB>and r<SUB>3 </SUB>are bigger than the radius r<SUB>max </SUB>of the hole.</p>
申请公布号 EP1979902(A1) 申请公布日期 2008.10.15
申请号 EP20070701839 申请日期 2007.01.29
申请人 SINGULUS TECHNOLOGIES AG 发明人 EDENHOFER, GEORG;BAZLEN, ROLF
分类号 G11B7/26 主分类号 G11B7/26
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