| 摘要 |
<p>PROBLEM TO BE SOLVED: To carry an insulation substrate in a static the substrate sucked. SOLUTION: A suction unit 23, having electrodes which are 4 mm in width and are provided at an interval smaller than 2 mm, is mounted on an arm part 22 of a substrate carrying unit 20. Since the unit 23 is able to provide a strong gradient, the unit 23 can such an insulation substrate 11. In that case, the substrate 11 can be carried in the state of suspension or in an erected state.</p> |
