发明名称 SEM test apparatus
摘要 Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.
申请公布号 US7436177(B2) 申请公布日期 2008.10.14
申请号 US20060418081 申请日期 2006.05.05
申请人 VIRGIN ISLANDS MICROSYSTEMS, INC. 发明人 GORRELL JONATHAN;DAVIDSON MARK;TOKARZ JEAN
分类号 H01J25/50 主分类号 H01J25/50
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