摘要 |
An infrared absorbing film (2) comprises a TiN-containing first layer (21) and an Si-based compound-containing second layer (22) and functions to convert infrared energy introduced from a second layer (22) side to heat. TiN has high infrared ray absorption in a wavelength range below 8 mum, but on the other hand, has high infrared ray reflectance in a wavelength range above 8 mum. Accordingly, stacking an Si-based compound layer having good infrared ray absorption in a long wavelength range onto a TiN layer can realize suitable infrared ray absorption in a wavelength range, which is low in absorption in the TiN layer, in the Si-based compound layer and, at the same time, can realize reflection of infrared rays, which is about to be passed through the Si-based compound layer, from the interface of the TiN layer and the Si-based compound layer to return the infrared rays to the Si-based compound layer. |