Method for assembling a single-flow turbomolecular vacuum pump, and a turbomolecular vacuum pump assembled by said method

摘要

A method for assembling a single-flow turbomolecular vacuum pump and a turbomolecular vacuum pump assembled by a method wherein the pump rotor, rotor shaft, antifriction bearings and motor armature are first assembled to form a unit, balanced outside of the pump casing, and thereafter introduced as a unit into the pump casing and mounted therein.