| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detecting method capable of emphasizing the defects of an inspection object, without depending on the luminance of the inspection object. SOLUTION: This defect detecting method has a Fourier transformation step for performing two-dimensional Fourier transformation of an imaged image acquired by imaging the inspection object 8, and calculating the first Fourier spectrum; a spectrum calculation step for performing weighting processing to components other than DC components of the first Fourier spectrum, and calculating the second Fourier spectrum; an inverse-Fourier transformation step for performing two-dimensional inverse-Fourier transformation of the second Fourier spectrum, and generating an enhanced image where a defect of the inspection object 8 is enhanced; a characteristic quantity calculation step for calculating the characteristic quantities by performing image processing of the enhanced image; and a determination step for comparing the calculated characteristic quantities with the thresholds of the characteristic quantities set beforehand, and determining whether the inspection object 8 is a nondefective article. COPYRIGHT: (C)2009,JPO&INPIT
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