LIQUID MATERIAL APPLYING APPARATUS

摘要

A coating apparatus is provided to enhance uniformity in a dry speed of fluid material discharged through a plurality of discharge holes by improving concentration uniformity of solvent components in the atmosphere around the fluid material. A coating apparatus includes a substrate holder, a discharge tool, a moving tool and an air current forming unit. The substrate holder holds a substrate. The discharge tool discharges fluid material from a plurality of discharge holes arranged on a main surface at the same intervals toward a coating region of the main surface of the substrate. The moving tool moves the discharge tool perpendicular to a sub-scanning direction and in a main scanning direction parallel to the main surface of the substrate, and moves the substrate in the sub-scanning direction whenever the discharge tool is moved to the main scanning direction. The air current forming unit forms the flow of air, which is parallel with the main surface of the substrate directing from the front side of a relative moving direction of the substrate to a rear side thereof in the sub-scanning direction, between the discharge tool and the substrate.