发明名称 |
SUPPORT FOR A COMPONENT OF AN OPTICAL DEVICE |
摘要 |
There is provided an arrangement for an optical device comprising a component of said optical device and a support structure supporting said component. The support structure comprises at least one locking device (113), the at least one locking device being connected to the component and comprising a first fixation (113-1) device and an associated second fixation device (113-2). The first fixation device and the second fixation device are adapted to be, in a movable state, movable with respect to each other along a first degree of freedom and a second degree of freedom into a final position. The first fixation device and the second fixation device are further adapted to be, in a locked state, fixed in the final position by at least one locking means contacting the first fixation device and the second fixation device. In the movable state, the first fixation device and the second fixation device are movable, up to the final position, in a manner free from a mutual pre-stress resulting from a restoring force exerted by at least a part of one of the first fixation device and the second fixation device. |
申请公布号 |
WO2008119386(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
WO2007EP53126 |
申请日期 |
2007.03.30 |
申请人 |
CARL ZEISS SMT AG;BISCHOFF, THOMAS;FEUCHT, JOACHIM;WIELAND, JOCHEN |
发明人 |
BISCHOFF, THOMAS;FEUCHT, JOACHIM;WIELAND, JOCHEN |
分类号 |
G02B7/00;G03F7/20 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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