| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus for inspecting an optical device capable of reducing an increase of a manufacturing cost by extending a replacement interval of an installed machine and improving workability. SOLUTION: An optical device installation part 55 having the optical device 44 installed is provided. The installation part 55 is equipped with positioning holes 57A and 57B in which positioning pins 491 and 492 provided on the optical device 44 are fitted. Reinforcing tools 58A and 58B for protecting peripheries 57A1 and 57B1 are provided on the peripheries 57A1 and 57B1 of the positioning holes 57A and 57B. COPYRIGHT: (C)2009,JPO&INPIT
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