发明名称 |
Kapazitiver Sensor zur Erfassung einer physikalischen Grösse, welcher eine physikalische Grösse entlang einer Mehrzahl von Achsen erfasst |
摘要 |
A control signal generator transmits a first signal to a movable electrode and a fixed electrode to detect a change in a capacitance formed between the movable electrode and the fixed electrode during a normal physical quantity detection timing interval. Also, the control signal generator transmits a second signal to the movable electrode and the fixed electrode instead of the first signal to move the movable electrode for diagnosing a malfunction of each of a plurality of physical quantity detection portions during a self diagnosis timing interval. The control signal generator transmits the second signal to the movable electrode and the fixed electrode of each physical quantity detection portion during a different timing intervals. |
申请公布号 |
DE10247467(B4) |
申请公布日期 |
2008.10.09 |
申请号 |
DE2002147467 |
申请日期 |
2002.10.11 |
申请人 |
DENSO CORP. |
发明人 |
ITAKURA, TOSHIKAZU |
分类号 |
G01P15/125;G01P21/00;G01D5/24;G01D5/241;G01P15/00;G01P15/18;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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