| 摘要 |
An apparatus for measuring a phase difference using a spectrometer is provided to improve the measurement accuracy by correcting a loss of transmittance due to absorption and dispersion. An apparatus for measuring a phase difference using a spectrometer comprises an optical system wherein a light source, a polarizer, a sample stage, an analyzer, and a spectrometer are sequentially placed and a calculating unit. A wave plate is placed between the spectrometer and the analyzer. A value obtained by dividing a retardation value of the wave plate by a constant or semi-constant of 0.5 or above is identical to each of two or more wavelength in a wavelength region.
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