发明名称 LIGHT SOURCE DEVICE AND EXPOSURE DEVICE USING SAME
摘要 PROBLEM TO BE SOLVED: To provide a light source device capable of projecting light with uniform illuminance for a long time. SOLUTION: Provided is the light source device 10 including a lamp unit 18 having a plurality of discharge lamps 30, reflectors 31 which are provided for the discharge lamps 30 respectively and reflect light beams emitted by the respective discharge lamps 30 to the same direction, and an abnormality decision means 28 of measuring voltages applied to the discharge lamps 30 individually and outputting an abnormality signal S3 when deciding abnormality; and an illumination controller 22 which has a function of individually powering on or off the discharge lamps 30, powers on discharge lamps 30 except one standby discharge lamp 30 at a start while keeping the standby discharge lamp 30 off, and powers on the standby discharge lamp 30 held in the power-off state so far while powering off a discharge lamp 30 decided as an abnormal discharge lamp 30 based upon the abnormality signal S3. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008241876(A) 申请公布日期 2008.10.09
申请号 JP20070079178 申请日期 2007.03.26
申请人 PHOENIX DENKI KK 发明人 SHIRAI TETSUYA;SEIKI YOSHIHIKO;NAKAGAWA ATSUJI
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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