MACHINING METHOD AND MACHINING DEVICE FOR CIRCULAR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a machining method and a machining device for a circular substrate eliminating influence on a product of burrs coming off from an outer edge part of the substrate in a process after punching. SOLUTION: The machining method includes a step for deburring the outer edge part of the substrate which is punched and a step for removing the burrs generated by the deburring from the upper part of the substrate. In the step of deburring, the burr is removed by rotating the substrate once or more while the outer edge part of the substrate is brought into rotational contact with guide members. The machining device has a deburring means provided with the guide members in rotational contact with the outer edge part of the punched substrate and a burr removing means removing the burrs adhering onto the substrate, and a rotational contact part of the guide members with the outer edge part of the substrate has a length sufficient for the substrate to be rotated once or more. COPYRIGHT: (C)2009,JPO&INPIT