| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device and its manufacturing method enabling formation of fine patterns by wet etching. SOLUTION: The electronic device is provided characterized by having a resistance heat generator which generates heat when power is distributed, an electrode connected to the resistance heat generator, a protective film covering at least part of the electrode, and a TiN film covering approximately the entire surface of the protective film. The manufacturing method of the electronic device characterized by forming a first layer, forming a TiN film on the first layer, and etching part of the first layer by wet etching by using the TiN film as a mask. COPYRIGHT: (C)2009,JPO&INPIT
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