| 摘要 |
PURPOSE:To prepare the titled whisker having high reinforcing effect and long fiber length by growing SiC whisker by introducing a gas contg. gaseous silane compd. and hydrocarbon gas into a specified zone, and elevating the reaction temp. further. CONSTITUTION:A base material (e.g. a pipe made of alumina) incorporated with a transition metal or a compd. (e.g. NiO) contg. the transition metal is placed for generating SiC whisker in an area for generating SiC whisker of an electric tubular furnace at 1,300-1,600 deg.C. Reducing or inactive gas (e.g. H2) contg. 0.5-50vol% gaseous silane compd. (e.g. silane) and a gaseous hydrocarbon compd. (e.g. methane) introduced into the region for growing the single crystal, heated at 1,300-1,450 deg.C for 30min-8hr to generate SiC whisker having a specified length; the temp. is furthr elevated with 0.1-1 deg.C/min temp. elevating rate upto at highest 1,600 deg.C with 30-300 deg.C temp. range. Finally, the gas is exchanged with inert gas, the furnace is cooled and the titled whisker is obtd. |
