发明名称 OPTICAL ELEMENT HOLDING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a holding apparatus for measuring a position of an optical element while reducing measurement error caused by a deformation of a supporting member which supports the optical element or by a difference of tilt between the optical element and the supporting member. <P>SOLUTION: The optical element holding apparatus includes the supporting member configured to support the optical element while coming in contact with the peripheral edge part of the optical element through a plurality of positions; a lens barrel configured to support the supporting member: sensors configured to detect the deformation of the optical element or the supporting member at a plurality of positions; and the actuator configured to drive the optical element based on the outputs from the sensors. The plurality of contact portions exist substantially on a first plane, if an axis perpendicular to the first plane and passing through a center of gravity of the optical element is set as an axis of rotation, the plurality of contact portions are located in substantially a same direction as the plurality of positions to be detected by the sensors in a direction of rotation around the axis of rotation. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008242448(A) 申请公布日期 2008.10.09
申请号 JP20080043071 申请日期 2008.02.25
申请人 CANON INC 发明人 MIZUNO MAKOTO
分类号 G02B7/02;H01L21/027 主分类号 G02B7/02
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