| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for branching/joining a fluid flow which can easily produce a high quality multilayer film applicable to wide optical uses even when the layer thickness ratio of a layer group to be formed is large. SOLUTION: In the method for branching/joining the fluid flow, in an x-y-z coordinate system, the fluid flow of the first step is made to flow to a fluid flow branching part 2 in the x direction and branched in the y direction in the fluid flow branching part 2 to form a plurality of separated fluids, and the separated fluids are joined together in the z direction in the fluid flow branching part to form the fluid flow of the second step. When a plurality of the separated fluids are formed, the fluid flow of the first step is branched so that the area of the cross section perpendicular to the x direction in the fluid flow branching part of at least one separated fluid out of a plurality of the separated fluids is different from those of the other separated fluids. COPYRIGHT: (C)2009,JPO&INPIT
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