COATING DEVICE OF FINE POWDER AND COATING METHOD OF FINE POWDER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a means for arranging fine powder in a large area and with a high density. SOLUTION: The coating device for arranging fine powder at a prescribed position on a substrate comprises: a member 105 which supports the substrate; a plurality of blades 101 which are arranged in parallel to one another while putting respective tips thereof in proximity to the surface of the substrate; a mechanism which supplies a dispersion liquid prepared by dispersing the fine powder into solvent, to between the blades and the substrate; and a mechanism 103 which relatively moves the blades and the substrate in the vertical direction to the blades. COPYRIGHT: (C)2009,JPO&INPIT