Actuator Arrangement for Active Vibration Isolation Using a Payload as an Inertial Reference Mass

摘要

System for and method of active vibration isolation to isolate a payload ( 57 ) from earth movements. The system has a body ( 16; 51 ), a mass ( 41 ) supported by the body ( 51 ) by means of at least one spring ( 45 ), a further mass ( 39 ) supported by the mass ( 41 ) by means of at least one further spring ( 43 ). A sensor senses a distance between the mass ( 41 ) and the further mass ( 39 ) and generates a distance signal. A controller ( 49 ) receives the distance signal and generates a control signal based on the distance signal. An actuator ( 47 ) actuates a position of said mass ( 41 ) based on the control signal, whereas the further mass supports the payload to be isolated from earth ( 16 ).