发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT AND PROGRAM FOR DESIGNING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit which can increase a possibility of arranging multi-cut vias. <P>SOLUTION: A semiconductor integrated circuit 1 includes a single-cut via 60 and a multi-cut via 30 including first and second vias 30a, 30b. An overhang (OHa or OHb) for at least one of the first and second vias 30a, 30b is smaller than an overhang OH for the single-cut via 60. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2008235626(A) 申请公布日期 2008.10.02
申请号 JP20070074005 申请日期 2007.03.22
申请人 NEC ELECTRONICS CORP 发明人 NISHIMUTA KEIICHI
分类号 H01L21/82 主分类号 H01L21/82
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