PIEZOELECTRIC VIBRATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which is wide in selecting the material quality of a vibrating part and has high reliability.

SOLUTION: The piezoelectric vibrator 300 comprises a substrate 10; a silicon oxide layer 20 formed on the substrate 10; a silicon layer 30 formed on the silicon oxide layer 20; a vibrating part formation layer 40 formed in contact on the silicon layer 30; the vibrating part 100 formed in a first opening H1 penetrating the vibrating part formation layer 40 in the shape of a cantilever beam and having a beam connecting part 110 fixed to the vibrating part formation layer 40 and a plurality of beams 120 extending from the beam connection part 110; a second opening part H2 penetrating the silicon layer 30 and formed under the first opening part H1 and the vibrating part 100; and driving parts 200 formed on the beams 120 and provided with piezoelectric elements 75.

COPYRIGHT: (C)2009,JPO&INPIT